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GB/T 13388-1992
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
General Product Information
| Document Type | National standards |
|---|---|
| Publisher Name | The National Technical Supervision Bureau |
| Standard Status | Replaced |
| Standard Code | GB/T 13388-1992 |
| CCS | \nTest methods for the physical properties of metals |
| ICS | Semiconductor materials |
| Implement Date | 1992-10-01 |
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