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T/QGCML 3970-2024 Active
T/QGCML 3970-2024 Semiconductor workshop intelligent detection and analysis system for metal dust
Abstract
Main technical content: This document specifies the terms and definitions, basic requirements, operating environment and functions, module functions, and operational tests of the intelligent detection and analysis system for metal dust in semiconductor workshops. This document is applicable to the design and application of the intelligent detection and analysis system for metal dust in semiconductor workshops.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/QGCML 3970-2024 |
| ICS | Comprehensive Application of Information Technology |
| Implement Date | 2024-04-11 |
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