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GB/T 32996-2025 Active
GB/T 32996-2025 Surface chemical analysis—Analysis of metal oxide films by glow discharge optical emission spectrometry
Abstract
This document describes a method for determining the thickness, mass per unit area, and chemical composition of metal oxide films using glow discharge emission spectroscopy.
This method is suitable for measuring the thickness of oxide films on metals ranging from 5 nm to 10,000 nm. The metal elements of the oxides include one or more of iron, chromium, nickel, copper, titanium, silicon, molybdenum, zinc, magnesium, manganese, zirconium, and aluminum. Other elements that can be measured include oxygen, carbon, nitrogen, hydrogen, phosphorus, and sulfur.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 32996-2025 |
| CCS | Basic standards and general methods |
| ICS | Chemical analysis |
| Implement Date | 2026-01-01 |
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