GB/T 25915.2-2021 Active
GB/T 25915.2-2021 Cleanrooms and associated controlled environments—Part 2:Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Abstract
This document specifies the basic requirements for a monitoring plan. This monitoring plan monitors the air cleanliness performance of cleanrooms or clean areas according to the particle concentration measured in the air or other parameters that affect it.
This document is applicable to the monitoring of particle concentrations in the size range of 0.1 μm to 5 μm.
This document is not applicable to monitoring activities such as vibration or general maintenance of engineering systems. The monitoring of ultrafine particle (particles smaller than 0.1 μm) concentrations will be specified in another standard.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 25915.2-2021 |
| CCS | Industrial dust and gas prevention and control technology |
| ICS | Clean rooms (sterile rooms) and related controlled environments |
| Implement Date | 2022-03-01 |