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GB/T 16943-2009
GB/T 16943-2009 Gas for electronic industry—Helium
Abstract
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of helium.
This standard applies to gaseous and liquid helium extracted from natural gas, air, and factory relief gases by cryogenic methods, as well as helium obtained by purification methods. They are used in semiconductor manufacturing as cleaning gases, pressurizing gases, and carrier gases, among other applications.
Molecular formula: He.
Relative molecular mass: 4.003 (based on the 2005 International Atomic Weight Table).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 16943-2009 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2010-05-01 |
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