GB/T 25915.14-2022 Active
GB/T 25915.14-2022 Cleanrooms and associated controlled environments—Part 14:Assessment of suitability for use of equipment by airborne particle concentration
Abstract
This document is applicable to evaluating the suitability of equipment used in cleanrooms and related controlled environments, including machinery, testing equipment, process equipment, components, and tools. According to GB/T 25915.1, the focus is on suspended particles with a size range of 0.1 μm to greater than or equal to 5 μm.
This document is not applicable to:
——Evaluating suitability based on microbial contamination;
——Testing the suitability of cleaning agents and cleaning technologies;
——The cleanability of equipment and materials;
——Requirements for equipment design and material selection;
——The physical properties of materials, such as electrostatic and thermal properties;
——Optimizing the performance of equipment in specific process scenarios;
——Selecting statistical methods for testing;
——Provisions and requirements of local safety regulations.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 25915.14-2022 |
| CCS | Industrial dust and gas prevention and control technology |
| ICS | Clean rooms (sterile rooms) and related controlled environments |
| Implement Date | 2023-07-01 |