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T/CIECCPA 007-2024 Active
T/CIECCPA 007-2024 The emission requirements for nitrogen oxides in the semiconductor industry
Abstract
Main technical content: This document stipulates the emission standard limits, testing requirements, and compliance assessment requirements for nitrogen oxides, an air pollutant generated during the industrial production process in the semiconductor industry.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/CIECCPA 007-2024 |
| CCS | Environmental protection |
| ICS | \nFixed source emission limits |
| Implement Date | 2024-03-08 |
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