T/SHMHZQ 021-2023 Active Group standards

T/SHMHZQ 021-2023 Semiconductor vacuum valve technical requirements specification

Publish Date: 2023-09-22 Implement Date: 2023-10-07 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/SHMHZQ 021-2023

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: \nValve Comprehensive

Publish Date: 2023-09-22

Implement Date: 2023-10-07

Scope

Scope: This standard specifies the technical requirements, forms, and basic parameters of semiconductor vacuum valves, as well as requirements for marking, packaging, transportation, and storage. This document applies to the technical requirements of vacuum valves used in photovoltaic, integrated circuits, compound semiconductors, and other equipment. Main technical content: Foreword 1 ; Scope 2; Normative reference documents 3; Terms and definitions 4; Classification and models 5; Technical requirements 5.1 ; Structural requirements 5.2; Material requirements 5.3; Performance requirements 5.4; Design requirements 5.5; Manufacturing requirements 5.6; Inspection requirements 5.7; Use requirements 5.8; Test methods 5.9; Inspection rules 6. Forms and basic parameters 6.1 ; Drive type 6.2; Model representation method 6.3; Basic parameters and connection dimensions 7. Marking, packaging, transportation, and storage 7.1 ; Marking 7.2; Packaging 7.3; Transportation 7.4; Storage 8. Requirements and evaluation