GB/T 22572-2008 Active National standards

GB/T 22572-2008 Surface chemical analysis—Secondary-ion mass spectrometry—Method for estimating depth resolution parameters with multiple delta-layer reference materials

Publish Date: 2008-12-11 Implement Date: 2009-10-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 22572-2008

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2008-12-11

Implement Date: 2009-10-01

Pages: 7 pages

Scope

This standard provides a detailed description of the steps for evaluating the three depth resolution parameters - front-edge decay length, back-edge decay length, and Gaussian broadening - using multi-δ layer reference materials in SIMS depth profiling.
Due to the instability of the physical and chemical states of the sample surface caused by the impact of primary incident ions, this standard is not applicable to the δ layer in the near-surface region.