GB/T 17866-1999 Active National standards

GB/T 17866-1999 Guideline for programmed defect masks and benchmark procedures for sensitivity analysis of mask defect inspection systems

Publish Date: 1999-09-13 Implement Date: 2000-06-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 17866-1999

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Semiconductor integrated circuits

ICS Name: Integrated circuits, microelectronics

Publish Date: 1999-09-13

Implement Date: 2000-06-01

Pages: 16 pages

Development Information

Word Count: 21 Thousand words Pages: 16 pages

Referenced Standards

GB/T 16880-1997 Guidelines for photomask defect classification and size definition SJ/T 10584-1994

Adopt standards

SEMI P23:1993

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