GB/T 34971-2017 Active National standards

GB/T 34971-2017 Guide for gaseous effluent handling in semiconductor industry

GB/T 34971-2017 Guide for gaseous effluent handling in semiconductor industry

Publish Date: 2017-11-01 Implement Date: 2018-02-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34971-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Chemical analysis

Publish Date: 2017-11-01

Implement Date: 2018-02-01

Pages: 20 pages

Scope

This standard specifies the principles and technologies of gas emission systems used in semiconductor manufacturing. This standard is applicable to the treatment of gases used in semiconductor manufacturing.

Development Information

Word Count: 38 Thousand words Pages: 20 pages

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