T/JGXH 005-2020 Superfast laser precision nano-microfabrication device
T/JGXH 005-2020 Superfast laser precision nano-microfabrication device
Basic Information
Scope
Scope: This document specifies the main technical parameters, technical requirements, safety and protection, accuracy inspection, inspection methods, inspection rules and marking, packaging, transportation and storage of ultrafast laser precision micro-nano processing equipment. This document is applicable to the development, production, and delivery of ultrafast laser precision micro-nano processing equipment. Main technical content: This document specifies the main technical parameters, technical requirements, safety and protection, accuracy inspection, inspection methods, inspection rules and marking, packaging, transportation and storage of ultrafast laser precision micro-nano processing equipment. This document is applicable to the development, production, and delivery of ultrafast laser precision micro-nano processing equipment.