GB/T 14264-1993
Replaced
T/TMAC 372-2026
Active
Group standards
T/TMAC 372-2026 Fully Automatic Brightfield Optical Wafer Defect Detection Equipment
T/TMAC 372-2026 Fully Automatic Brightfield Optical Wafer Defect Detection Equipment
Price:
$ 20.00
Basic Information
Standard Code:
T/TMAC 372-2026
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Medical electronic instruments and equipment
ICS Name:
Integrated Components of Semiconductor Devices
Publish Date:
2026-03-30
Implement Date:
2026-03-30
Scope
This document is applicable to the automatic bright-field optical defect detection equipment for silicon wafers and compound semiconductor wafers. This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage for fully automatic bright-field optical wafer defect detection equipment.
Development Information
Related Standards
GB/T 14844-1993
Replaced
GB/T 14844-1993 Designations of semiconductor materials
GB/T 17573-1998
Active
GB/T 17573-1998 Semiconductor devices Discrete devices and integrated circuits Part 1:General
GB/T 12560-1999
Active
GB/T 12560-1999 Semiconductor devices Sectional specification for discrete devices
GB/T 11499-2001
Active
GB/T 11499-2001 Letter symbols for discrete semiconductor devices
GB/T 20521-2006
Active