GB/T 13840-1992
Abolished
YS/T 791-2012
Active
Industry standards-Non-ferrous metals
YS/T 791-2012 Platinum target
YS/T 791-2012 Platinum target
Basic Information
Standard Code:
YS/T 791-2012
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Precious metals and their alloys
ICS Name:
Other non-ferrous metals and their alloys
Publish Date:
2012-11-07
Implement Date:
2013-03-01
Pages:
5 pages
Scope
This standard specifies the requirements, test methods, inspection rules, and marking, packaging, transportation, storage, and contracts or purchase orders for platinum targets.
This standard applies to all types of platinum sputtering targets used in semiconductor devices (hereinafter referred to as platinum targets), and platinum targets for other purposes can also be used as a reference.
Development Information
Referenced Standards
GB/T 1419-2004 Sponge platinum
GB/T 15077-2008 Geometric size measuring methods of precious metals and their alloy materials
GB/T 1182-1996 Geometrical tolerancing—Generalities, definitions, symbols, indications on drawings
GB/T 1182-2008 Geometrical Product Specifications(GPS)—Geometrical tolerancing—Tolerances of form, orientation, location and run-out
GB/T 1182-2018 Geometrical product specifications(GPS)—Geometrical tolerancing—Tolerances of form,orientation,location and run-out
Related Standards
GB/T 15677-1995
Replaced
GB/T 15677-1995 Lanthanum metal
GB/T 3136-1995
abolished_transferred
GB/T 3136-1995 Tantalum powders
GB/T 3463-1995
Abolished
GB/T 3463-1995 Tantalum wires
GB/T 3628-1995
Replaced
GB/T 3628-1995 Tantalum and tantalum alloy foils
GB/T 16476-1996
Replaced