T/ICMTIA TG0011-2022 Active Group standards

T/ICMTIA TG0011-2022 High-purity aluminum and aluminum alloy sputtering target for integrated circuits

Publish Date: 2022-04-08 Implement Date: 2022-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ICMTIA TG0011-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Light metals and their alloys

ICS Name: Aluminum and aluminum alloys

Publish Date: 2022-04-08

Implement Date: 2022-05-01

Scope

Main technical content: This document specifies the technical requirements, testing methods, packaging and transportation, and safety requirements for high-purity aluminum and aluminum alloy sputtering targets used in integrated circuits. This document is applicable to high-purity aluminum and aluminum alloy targets used in integrated circuit manufacturing.