YS/T 839-2012 Active Industry standards-Non-ferrous metals

YS/T 839-2012 Test method for measurement of insulator thickness and refractive index on silicon substrates by ellipsometry

Publish Date: 2012-11-07 Implement Date: 2013-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 839-2012

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: Precious metals and their alloys

ICS Name: Other non-ferrous metals and their alloys

Publish Date: 2012-11-07

Implement Date: 2013-03-01

Pages: 10 pages

Scope

1.1 This method specifies the method of measuring the thickness and refractive index of insulator films grown or deposited on silicon substrates using elliptical polarization testing methods.
1.2 This method is suitable for measuring the thickness and refractive index of insulator films that do not absorb the test wavelength and the substrate is not transparent at the test wavelength, and the refractive index and extinction coefficient of the substrate at the test wavelength are known. For non-insulator films, this method can be used only when certain conditions are met.