GB/T 3163-1993
Replaced
GB/T 32218-2015
Active
National standards
GB/T 32218-2015 Vacuum technology—Test methods for leak rates of vacuum system
GB/T 32218-2015 Vacuum technology—Test methods for leak rates of vacuum system
Basic Information
Standard Code:
GB/T 32218-2015
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Vacuum technology and equipment
ICS Name:
Vacuum technology
Publish Date:
2015-12-10
Implement Date:
2017-01-01
Pages:
16 pages
Scope
This standard specifies the testing principles, instruments and equipment, testing conditions, testing procedures, handling of test interruptions, and test records and reports for testing the leakage rate of vacuum systems using helium mass spectrometry and pressurization methods.
This standard is applicable to the leakage rate testing of vacuum systems (hereinafter referred to as the items being tested).
Development Information
Referenced Standards
GB/T 3864-2008 Industrial nitrogen
GB/T 4844-2011 Pure helium,high pure helium and ultra pure helium
GB/T 3163-1993 Terminology for vacuum technology
GB/T 3163-2007 Vacuum technology—Terminology
GB/T 18193-2000 Vacuum technology—Mass-spectrometer-type leak-detector calibration
GB/T 3163-2024 Vacuum technology—Vocabulary
Related Standards
GB/T 3164-1993
Replaced
GB/T 3164-1993 Vacuum technology—Graphical symbols
GB/T 6070-1995
Replaced
GB/T 6070-1995 Vacuum flanges
GB/T 11164-1999
Replaced
GB/T 11164-1999 Vacuum coating plant generic specification
GB/T 18193-2000
Active
GB/T 18193-2000 Vacuum technology—Mass-spectrometer-type leak-detector calibration
GB/T 4982-2003
Replaced