GB/T 36401-2018 Active National standards

GB/T 36401-2018 Surface chemical analysis—X-ray photoelectron spectroscopy—Reporting of results of thin-film analysis

Publish Date: 2018-06-07 Implement Date: 2019-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 36401-2018

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2018-06-07

Implement Date: 2019-05-01

Pages: 42 pages

Scope

This standard provides a description of the minimum information requirements for an analysis report of a thin film on a substrate using XPS. These analyses involve measuring the chemical composition and uniform film thickness, as well as measuring the chemical composition of non-uniform films as a function of depth using angle-resolved XPS, XPS sputter depth profiling, peak shape analysis, and variable photon energy XPS.