GB/T 29056-2012 Replaced National standards

GB/T 29056-2012 Trichlorosilane for silicon epitaxy—Determination of boron,aluminium,phosphorus,vanadium,chrome,manganese,iron,cobalt,nickel,copper,arsenic,molybdenum and antimony content—Inductively coupled plasma mass spectrometric method

Publish Date: 2012-12-31 Implement Date: 2013-10-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 29056-2012

Standard Type: National standards

Standard Status: Replaced

is_force_gb: no

CCS Name: Electronic devices and specialized materials, parts, and structural components

ICS Name: Special materials for electronic technology

Publish Date: 2012-12-31

Implement Date: 2013-10-01

Pages: 12 pages

Scope

This standard specifies the method for determining the trace element content of boron, aluminum, phosphorus, vanadium, chromium, manganese, iron, cobalt, nickel, copper, molybdenum, arsenic, and antimony in silicon epitaxy-grade trichlorosilane (SiHCl3) using inductively coupled plasma mass spectrometers (ICP-MS).
This standard is applicable to the determination of the content of boron, aluminum, phosphorus, vanadium, chromium, manganese, iron, cobalt, nickel, copper, molybdenum, arsenic, and antimony in silicon epitaxy-grade trichlorosilane (SiHCl3). The measurement ranges for each element are shown in Table 1.

Development Information

Word Count: 13 Thousand words Pages: 12 pages

Superseded by the following standards

GB/T 29056-2025 Determination of impurity content in trichlorosilane for silicon epitaxy—Inductively coupled plasma mass spectrometry

Related Standards

GB/T 2413-1981 Active

GB/T 2413-1981 Piezoelectric ceramic materials—Measuring methods for determination of volume density

Publish Date: 1980-12-31

GB/T 3389.4-1982 Replaced

GB/T 3389.4-1982 Test methods for the properties of piezoelectric ceramics—Longitudinal length extension vibration mode for rod

Publish Date: 1982-12-30

GB/T 5594.1-1985 Active

GB/T 5594.1-1985 Test methods for properties of structure ceramic used in electronic components—Test method for gas-tightness

Publish Date: 1985-11-27

GB/T 5594.2-1985 Active

GB/T 5594.2-1985 Test methods for properties of structure ceramic used in electronic components—Test method for Youngs elastic modulus and Poisson ratio

Publish Date: 1985-11-27

GB/T 5594.3-1985 Replaced

GB/T 5594.3-1985 Test methods for properties of structure ceramic used in electronic components—Test method for mean coefficient of linear expansion

Publish Date: 1985-11-27

GB/T 5594.4-1985 Replaced

GB/T 5594.4-1985 Test methods for properties of structure ceramic used in electronic components—Test method for dielectric loss angle tangent value

Publish Date: 1985-11-27