GB/T 29056-2025 Active National standards

GB/T 29056-2025 Determination of impurity content in trichlorosilane for silicon epitaxy—Inductively coupled plasma mass spectrometry

GB/T 29056-2025 Determination of impurity content in trichlorosilane for silicon epitaxy—Inductively coupled plasma mass spectrometry

Publish Date: 2025-10-31 Implement Date: 2026-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 29056-2025

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Analysis methods for semi-metallic and semiconductor materials

ICS Name: \nMetal material testing

Publish Date: 2025-10-31

Implement Date: 2026-05-01

Pages: 12 pages

Scope

This document describes the method of determining the content of lithium, boron, sodium, magnesium, aluminum, potassium, calcium, phosphorus, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, gallium, molybdenum, arsenic, and lead in trichlorosilane used for silicon epitaxy by inductively coupled plasma mass spectrometry.
This document is applicable to the determination of the content of impurity elements in trichlorosilane used for silicon epitaxy. The determination ranges of each element are shown in Table 1.

Development Information

Word Count: 15 Thousand words Pages: 12 pages

Replace the following standards

GB/T 29056-2012 Trichlorosilane for silicon epitaxy—Determination of boron,aluminium,phosphorus,vanadium,chrome,manganese,iron,cobalt,nickel,copper,arsenic,molybdenum and antimony content—Inductively coupled plasma mass spectrometric method

Referenced Standards

GB/T 602-2002 Chemical reagent—Preparations of standard solutions for impurity GB/T 11446.1-2013 Electronic grade water GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness by particle concentration GB/T 602-2026 Chemical reagent—Preparations of standard solutions for impurity

Related Standards

GB/T 3656-1983 Replaced

GB/T 3656-1983 Measurement methods of magnetic properties of electrical iron

Publish Date: 1983-05-02

GB/T 3657-1983 Replaced

GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys

Publish Date: 1983-05-02

GB/T 3849-1983 Replaced

GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method

Publish Date: 1983-09-14

GB/T 3850-1983 Replaced

GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density

Publish Date: 1983-09-14

GB/T 3851-1983 Replaced

GB/T 3851-1983 Hardmetals—determination of transverse rupture strength

Publish Date: 1983-09-14

GB/T 4326-1984 Replaced

GB/T 4326-1984 Extrinsic semiconductor single crystals—measurement of Hall mobility and Hall coefficient

Publish Date: 1984-04-12