T/SSEA 0327-2023 Ultra-high purity stainless steel rod for semiconductor manufacturing equipment
T/SSEA 0327-2023 Ultra-high purity stainless steel rod for semiconductor manufacturing equipment
Basic Information
Scope
Main technical content: This document specifies the classification, order content, dimensions, shape, weight, technical requirements, test methods, inspection rules, packaging, marking, and quality certificates of ultra-high purity stainless steel rods (collectively referred to as round steel, square steel, flat steel, and hexagonal steel, hereinafter referred to as steel rods) used in semiconductor manufacturing equipment. This document applies to ultra-high purity stainless steel hot-rolled steel rods, cold-drawn blanks, and cold-drawn steel rods with dimensions (diameter, side length, thickness, or distance between opposite sides, hereinafter referred to as dimensions) not exceeding 150mm, used in semiconductor manufacturing equipment valves and steel pipes.