JJF 1932-2021 Active National Metrology Technical Specifications JJF

JJF 1932-2021 Calibration Specification for Ellipsometers

JJF 1932-2021 Calibration Specification for Ellipsometers

Publish Date: 2021-12-08 Implement Date: 2022-06-08 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: JJF 1932-2021
Standard Type: National standards
Standard Status: Active
is_force_gb: no
CCS Name: -
ICS Name: -
Publish Date: 2021-12-08
Implement Date: 2022-06-08
Pages: 24 pages

Scope

This specification applies to the calibration of ellipsometers with a wavelength range of 250 nm to 2,000 nm.

Development Information

Word Count: 29 Thousand words Pages: 24 pages

Referenced Standards

GJB/J 5463 SEMI E141-0705 Handbook of Ellipsometry 椭偏术手册 HG Tompkins and EA Irene (eds.) William Andrew Publishing 2005 Ellipsometry and Polarized Light 椭偏术和偏振光 RMA Azzam and NM Bashara North-Holland Physics Publishing 1977 JJF 1497-2014 Calibration Specification for Polarimeters

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