DZ/T 0101.12-1994
Active
JJF 1932-2021
Active
National Metrology Technical Specifications JJF
JJF 1932-2021 Calibration Specification for Ellipsometers
JJF 1932-2021 Calibration Specification for Ellipsometers
Basic Information
Standard Code:
JJF 1932-2021
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
2021-12-08
Implement Date:
2022-06-08
Pages:
24 pages
Scope
This specification applies to the calibration of ellipsometers with a wavelength range of 250 nm to 2,000 nm.
Development Information
Referenced Standards
GJB/J 5463
SEMI E141-0705
Handbook of Ellipsometry 椭偏术手册 HG Tompkins and EA Irene (eds.) William Andrew Publishing 2005
Ellipsometry and Polarized Light 椭偏术和偏振光 RMA Azzam and NM Bashara North-Holland Physics Publishing 1977
JJF 1497-2014 Calibration Specification for Polarimeters
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