T/DLSHXH 006-2022 Active Group standards

T/DLSHXH 006-2022 Electronic specialty gas: Tri-methyl aluminum

Publish Date: 2022-09-30 Implement Date: 2022-10-20 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/DLSHXH 006-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Industrial gases

Publish Date: 2022-09-30

Implement Date: 2022-10-20

Scope

Main technical content: This standard specifies the technical requirements, test methods, inspection rules, packaging, marking, storage and transportation, and safety information for trimethylaluminum. This standard applies to trimethylaluminum finished products made from industrial-grade trimethylaluminum through distillation purification. This product is mainly used in atomic layer deposition processes.

Development Information

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