GB/T 16878-1997 Active National standards

GB/T 16878-1997 Specification for metrology pattern cells for integrated circuit manufacture

Publish Date: 1997-06-20 Implement Date: 1998-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 16878-1997

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Special processing equipment

ICS Name: Integrated circuits, microelectronics

Publish Date: 1997-06-20

Implement Date: 1998-03-01

Pages: 16 pages

Development Information

Word Count: 24 Thousand words Pages: 16 pages

Referenced Standards

SJ/T 10152-91 SJ/T 10584-94

Adopt standards

SEMI P19:1992

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