GB/T 14465-1993
Active
GB/T 42106-2022
Active
National standards
GB/T 42106-2022 Nanotechnology—Fabrication of three dimensional nanostructures and devices—A strain method induced by ion beam irradiation
GB/T 42106-2022 Nanotechnology—Fabrication of three dimensional nanostructures and devices—A strain method induced by ion beam irradiation
Basic Information
Standard Code:
GB/T 42106-2022
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Physics and mechanics
ICS Name:
Physics, Chemistry
Publish Date:
2022-12-30
Implement Date:
2023-07-01
Pages:
10 pages
Scope
This document describes the processing method of using ion beam irradiation-induced strain technology to construct three-dimensional nanostructures and devices, mainly including processing principles, materials and equipment, environmental conditions, and processing methods. This document is applicable to the spatial strain of upright nanowires and planar nanofilms induced by ion beam irradiation, and subsequently realizes three-dimensional nanostructures and devices composed of one-dimensional nanowires and two-dimensional nanofilms in three-dimensional space.
Development Information
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