GB/T 34002-2017 Microbeam analysis—Analytical transmission electron microscopy—Methods for calibrating image magnification by using reference materials having periodic structures
GB/T 34002-2017 Microbeam analysis—Analytical transmission electron microscopy—Methods for calibrating image magnification by using reference materials having periodic structures
Basic Information
Scope
This standard specifies the calibration method for images recorded by transmission electron microscopes (TEMs) over a wide range of magnifications. The standard materials used for calibration have periodic structures, such as diffraction grating replicas, superlattice structures of semiconductors, or spectroscopic crystals for X-ray analysis, as well as crystal lattice images of carbon, gold, or silicon.
This standard applies to the magnifications of TEM images recorded on photographic film, captured on imaging plates, or acquired by digital camera built-in sensors. This standard can also be used for calibrating rulers, but it is not applicable to dedicated critical dimension measurement transmission electron microscopes (CD-TEMs) and scanning transmission electron microscopes (STEMS).