GB/T 10972-2002
Abolished
GB/T 23414-2026
Pending
National standards
GB/T 23414-2026 Microbeam analysis—Scanning electron microscopy—Vocabulary
GB/T 23414-2026 Microbeam analysis—Scanning electron microscopy—Vocabulary
Basic Information
Standard Code:
GB/T 23414-2026
Standard Type:
National standards
Standard Status:
Pending
is_force_gb:
no
CCS Name:
Electronic optics and other physical optical instruments
ICS Name:
Imaging technology (vocabulary)
Publish Date:
2026-01-28
Implement Date:
2026-08-01
Pages:
36 pages
Scope
This document defines the terms used in the practical application of scanning electron microscopy (SEM). It includes basic terms and terms classified by different technical content, as well as terms already defined in ISO 23833.
This document is applicable to all standardization documents related to the practical application of SEM. Additionally, some of the terms in this document are also applicable to documents in related fields [such as electron probe microanalysis (EPMA), analytical electron microscopy (AEM), energy dispersive X-ray spectrometry (EDX), etc.].
Development Information
Replace the following standards
Adopt standards
ISO 22493:2014
Related Standards
GB/T 6159.1-2003
Replaced
GB/T 6159.1-2003 Micrographics—Vocabulary—Part 1:General terms
GB/T 6159.3-2003
Replaced
GB/T 6159.3-2003 Micrographics—Vocabulary—Part 3:Film processing
GB/T 6159.4-2003
Replaced
GB/T 6159.4-2003 Micrographics—Vocabulary—Part 4:Materials and packaging
GB/T 6159.6-2003
Active
GB/T 6159.6-2003 Micrographics—Vocabulary—Part 6:Equipment
GB/T 6159.8-2003
Active