GB/T 10972-2002
Abolished
GB/T 23414-2009
Active
National standards
GB/T 23414-2009 Microbeam analysis—Scanning electron microscopy—Vocabulary
GB/T 23414-2009 Microbeam analysis—Scanning electron microscopy—Vocabulary
Basic Information
Standard Code:
GB/T 23414-2009
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic optics and other physical optical instruments
ICS Name:
Imaging technology (vocabulary)
Publish Date:
2009-04-01
Implement Date:
2009-12-01
Pages:
31 pages
Scope
This standard defines the terms used in scanning electron microscopy (SEM) practice. It includes general terms and terms for specific concepts classified by technology, as well as terms already defined in ISO 23833.
This standard applies to all standardized documents related to SEM practice. In addition, some of the term definitions in this standard also apply to documents in related fields [for example: electron probe microanalysis (EPMA), analytical electron microscopy (AEM), energy dispersive X-ray spectrometry (EDX), etc.].
Development Information
Adopt standards
ISO 22493:2008
Related Standards
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GB/T 6159.1-2003 Micrographics—Vocabulary—Part 1:General terms
GB/T 6159.3-2003
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GB/T 6159.3-2003 Micrographics—Vocabulary—Part 3:Film processing
GB/T 6159.4-2003
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GB/T 6159.4-2003 Micrographics—Vocabulary—Part 4:Materials and packaging
GB/T 6159.6-2003
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GB/T 6159.6-2003 Micrographics—Vocabulary—Part 6:Equipment
GB/T 6159.8-2003
Active