GB/T 34178-2017 Active National standards

GB/T 34178-2017 Silica glass substrates for photomask

GB/T 34178-2017 Silica glass substrates for photomask

Publish Date: 2017-09-07 Implement Date: 2018-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34178-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Quartz glass

ICS Name: \nGlass products

Publish Date: 2017-09-07

Implement Date: 2018-08-01

Pages: 12 pages

Scope

This standard specifies the terms and definitions, requirements, test methods, inspection rules, and marking, packaging, transportation, and storage of quartz glass substrates for photomasks (hereinafter referred to as quartz glass substrates). This standard is applicable to quartz glass substrates for photomasks used in lithography processes such as semiconductor integrated circuits, optical communications, micro-electromechanical systems (MEMS), optoelectronic devices, and light-emitting diodes (LEDs).

Development Information

Word Count: 22 Thousand words Pages: 12 pages

Referenced Standards

GB/T 3284-2015 Analytical method of the chemical composition in the quartz glass GB/T 5949-1986 Test method of alveolus and gas line in transparent silica glass GB/T 5949-2014 Test method for bubble and air line of transparent quartz glass GB/T 32189-2015 Test method for surface roughness of GaN single crystal substrate by atomic force microscope JC/T 185-2013 Optical quartz glass。 JC/T 655-2012 The method for inspecting internal stress of quartz glass products according to JC/T 655-2012 JC/T 2205-2014 Quartz glass terminology

Related Standards

GB/T 4771-1984 Replaced

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Publish Date: 1984-11-30

GB/T 6552-1986 Replaced

GB/T 6552-1986 Standard test method for impact resistance of glass containers

Publish Date: 1986-06-21

GB 11417.1-1989 Replaced

GB 11417.1-1989 Hard corneal contact lenses

Publish Date: 1989-07-04

GB 11417.2-1989 Replaced

GB 11417.2-1989 Soft hydrophilic contact lenses

Publish Date: 1989-07-04

GB/T 12415-1990 Replaced

GB/T 12415-1990 Pharmaceutical glass containers—Stress examination— Test methods

Publish Date: 1990-07-17

GB/T 12416.1-1990 Abolished

GB/T 12416.1-1990 Pharmaceutical glass containers—Hydrolytic resistance—Test method and classification

Publish Date: 1990-07-17