GB/T 32189-2015 Active National standards

GB/T 32189-2015 Test method for surface roughness of GaN single crystal substrate by atomic force microscope

GB/T 32189-2015 Test method for surface roughness of GaN single crystal substrate by atomic force microscope

Publish Date: 2015-12-10 Implement Date: 2016-11-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 32189-2015

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: \nTest methods for the physical properties of metals

ICS Name: \nMetal material testing

Publish Date: 2015-12-10

Implement Date: 2016-11-01

Pages: 11 pages

Scope

This standard specifies the method of testing the surface roughness of gallium nitride single-crystal substrates using atomic force microscopy. This standard is applicable to gallium nitride single-crystal substrates with a surface roughness of less than 10 nm, which are grown by chemical vapor deposition and other methods. For other semiconductor single-crystal substrates with similar surface structures, before testing using the method provided in this standard, both parties involved in the testing need to reach an agreement through consultation.

Development Information

Word Count: 20 Thousand words Pages: 11 pages

Referenced Standards

GB/T 3505-2000 Geometrical product specifications (GPS)—Surface texture:Profile method—Terms, definitions and surface texture parameters GB/T 3505-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Terms,definitions and surface texture parameters GB/T 14264-1993 Semiconductor materials—Terms and definitions GB/T 14264-2009 Semiconductor materials—Terms and definitions GB/T 14264-2024 Terminology of semiconductor materials GB/T 27760-2011 Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using Si(111) monatomic steps JJF 1351-2012 Calibration Specification for Scanning Probe Microscopes

Related Standards

GB/T 3656-1983 Replaced

GB/T 3656-1983 Measurement methods of magnetic properties of electrical iron

Publish Date: 1983-05-02

GB/T 3657-1983 Replaced

GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys

Publish Date: 1983-05-02

GB/T 3849-1983 Replaced

GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method

Publish Date: 1983-09-14

GB/T 3850-1983 Replaced

GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density

Publish Date: 1983-09-14

GB/T 3851-1983 Replaced

GB/T 3851-1983 Hardmetals—determination of transverse rupture strength

Publish Date: 1983-09-14

GB/T 4326-1984 Replaced

GB/T 4326-1984 Extrinsic semiconductor single crystals—measurement of Hall mobility and Hall coefficient

Publish Date: 1984-04-12