GB/T 30040.1-2013
Active
T/CMES 24021-2024
Active
Group standards
T/CMES 24021-2024 The technical requirements for detecting pollutants and measuring surface roughness of semiconductor ultra-pure polymer flowing components
T/CMES 24021-2024 The technical requirements for detecting pollutants and measuring surface roughness of semiconductor ultra-pure polymer flowing components
Price:
$ 20.00
Basic Information
Standard Code:
T/CMES 24021-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Comprehensive overview of fluid storage devices
Publish Date:
2024-12-30
Implement Date:
2025-01-30
Scope
Main technical content: This document specifies the methods for detecting contaminants in ultra-pure polymer overflow components of semiconductors, as well as the technical requirements for surface roughness, data organization, and inspection reports, etc.
Development Information
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