T/BEA 43007-2024 Active Group standards

T/BEA 43007-2024 Microleakage detection method for electronic devices

Publish Date: 2024-09-11 Implement Date: 2024-09-20 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/BEA 43007-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Integrated Metrology and Measurement

Publish Date: 2024-09-11

Implement Date: 2024-09-20

Scope

Scope: This standard applies to electronic devices in the electronics industry, such as traveling wave tubes, klystrons, photoelectric devices, gyroscopes, and power switching devices, whose leakage rates are required to be within the range of (1×10-11~5×10-16) Pa·m3/s. Main technical content: 3.1 Definition of terms: The following terms and definitions apply to this specification. 3.2 Ion current: The electrical signal strength measured by a mass spectrometer to indicate the gas components, with units in amperes. 3.3 Cumulative comparison method: The leaked gas from the tested item and the standard gas flow are respectively introduced into the mass spectrometry chamber. After cutting off the vacuum pumping unit in the mass spectrometry chamber, the leaked gas is accumulated. The mass spectrometer measures the rate of change of the ion current caused by the leaked gas in the mass spectrometry chamber over time. The rate of change of the ion current caused by the leaked gas from the standard gas flow is taken as the standard. The leakage rate of the tested item is calculated based on the linear relationship between the ion current change within a certain range. 4. Overview 4.1 Structure of the ultra-sensitive leak detector used for detecting micro-leakage in electronic devices: It mainly consists of an internal standard gas flow, a mass spectrometry system, a vacuum acquisition system, electronic circuits, and other electrical components. 1 is the vacuum pumping unit; 2, 4, 8, 9 are vacuum valves; 3 is the mass spectrometry chamber; 5 is the getter pump; 6 is the mass spectrometer; 7 is the internal standard gas flow; 10 is the tested item; and 13 is the vacuum gauge. The structural principle diagram of the device is shown in Figure 1. 4.2 Principle: The leaked gas from the tested item and the internal standard gas flow of the ultra-sensitive leak detector are respectively introduced into the vacuum chamber. After cutting off the pumping system in the vacuum chamb