T/YGAZXH 12-2025 Active Group standards

T/YGAZXH 12-2025 The technical specifications for plasma enhanced chemical vapor deposition coating equipment used in photovoltaic cell processing

T/YGAZXH 12-2025 The technical specifications for plasma enhanced chemical vapor deposition coating equipment used in photovoltaic cell processing

Publish Date: 2025-07-16 Implement Date: 2025-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/YGAZXH 12-2025
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: Normal diagnostic instruments
ICS Name: Comprehensive Electrical Engineering
Publish Date: 2025-07-16
Implement Date: 2025-08-01

Scope

Main technical content: This document provides the working environment and working conditions of plasma enhanced chemical vapor deposition coating equipment, and specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage. This document is applicable to the manufacture and inspection of PECVD coating equipment used in the production of passivated emitter rear contact (PERC) cells, passivated emitter rear surface fully diffused (PERT) cells, tunnel oxide passivated contact (TOPCon) solar cells, and back contact (BC) cells, etc.

Development Information

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