GB/T 42659-2023 Active National standards

GB/T 42659-2023 Surface chemical analysis—Scanning probe microscopy—Determination of geometric quantities using SPM:Calibration of measuring systems

Publish Date: 2023-08-06 Implement Date: 2024-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 42659-2023

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2023-08-06

Implement Date: 2024-03-01

Pages: 53 pages

Scope

This document describes the characterization and calibration methods for the scanning axis of scanning probe microscopes (SPMs) used for the highest-level geometric measurements, which are suitable for providing further calibration for measurement systems, but not for general industrial applications with lower calibration requirements.
The purpose of this document is to:
—— Improve the comparability of SPM geometric measurement results by tracing back to length units;
—— Specify the minimum requirements for calibration procedures and acceptance conditions;
—— Confirm the capability of the calibrated instrument (assign the instrument to a category with "calibration capability");
—— Specify the scope of calibration (measurement and environmental conditions, measurement range, time stability, and versatility);
—— Provide a model for calculating the uncertainty of simple geometric quantities in SPM measurements according to ISO/IEC Guide 98-3;
—— Specify the requirements for reporting results.