SJ 21256-2018 Active Industry standards-Electronics

SJ 21256-2018 Technological verification procedures for film sputtering equipment

Publish Date: 2018-01-18 Implement Date: 2018-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: SJ 21256-2018

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: -

Publish Date: 2018-01-18

Implement Date: 2018-05-01

Pages: 10 pages

Scope

This standard specifies the general requirements, verification conditions, and verification methods for the process verification of sputtering coating equipment. This standard applies to the verification of the process performance of ion beam sputtering and magnetron sputtering coating equipment (hereinafter referred to as coating equipment).

Development Information

Pages: 10 pages

Referenced Standards

GB/T 25915.1-2010 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness

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