GB/T 20307-2006 Active National standards

GB/T 20307-2006 General rules for nanometer-scale length measurement by SEM

Publish Date: 2006-07-19 Implement Date: 2007-02-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 20307-2006

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Electronic optics and other physical optical instruments

ICS Name: Measurement of length and angle

Publish Date: 2006-07-19

Implement Date: 2007-02-01

Pages: 16 pages

Scope

This standard specifies the basic principles for measuring nanoscale lengths using scanning electron microscopy. It is applicable to measuring the spacing between points or lines ranging from 10 nm to 500 nm.

Development Information

Word Count: 26 Thousand words Pages: 16 pages

Referenced Standards

JJF 1059-1999 BIPM IEC IFCC ISO IUPAC IUPAP OIML-1993《Guide to the Expression of Uncertainty in Measurement》(测量不确定度表示指南)

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