T/CEMIA 032-2022
Active
Group standards
T/CEMIA 032-2022 Buffered oxide etchant for display panels
T/CEMIA 032-2022 Buffered oxide etchant for display panels
Price:
$ 24.00
Basic Information
Standard Code:
T/CEMIA 032-2022
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic devices and specialized materials, parts, and structural components
ICS Name:
Special materials for electronic technology
Publish Date:
2022-04-20
Implement Date:
2022-07-20
Pages:
16 pages
Scope
This document specifies the abbreviations, classification, requirements, testing methods, inspection rules, and marking, packaging, transportation, storage, and safety of the oxide layer buffer etching solution for display panels.
This document is applicable to the oxide layer buffer etching solution for display panels, which is composed of aqueous hydrofluoric acid and aqueous ammonium fluoride, and is suitable for etching silicon oxide and silicon nitride layers in the manufacturing of display panels, as well as for the cleaning process of silicon oxide and silicon nitride layers.
The basic information of hydrofluoric acid and ammonium fluoride is provided in Appendix A, Section A.1.
Development Information
Referenced Standards
GB 190-1990 Labels for packages of dangerous goods
GB 190-2009 Packing symbol of dangerous goods
GB/T 601-2002 Chemical reagent Preparations of standard volumetric solutions
GB/T 601-2016 Chemical reagent—Preparations of reference titration solutions
GB/T 602-2002 Chemical reagent—Preparations of standard solutions for impurity
GB/T 603-2002 Chemical reagent—Preparations of reagent solutions for use in test methods
GB/T 603-2023 Chemical reagent—Preparations of reagent solutions for use in test methods
GB/T 6678-2003 General principles for sampling chemical products
GB/T 6680-2003 General rules for sampling liquid chemical products
GB/T 8170-1987 Rules for rounding off of numberical values
GB/T 8170-2008 Rules of rounding off for numerical values & expression and judgement of limiting values
GB/T 8979-1996 Pure nitrogen
GB/T 8979-2008 Pure nitrogen and high purity nitrogen and ultra pure nitrogen
GB/T 11446.1-1997 Electronic grade water
GB/T 11446.1-2013 Electronic grade water
GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals
GB 15258-2009 General rules for preparation of precautionary label for chemicals
GB 15603-1995 Rule for storage of chemical dangers
GB 15603-2022 General rules for the hazardous chemicals warehouse storage
GB/T 34672-2017 Chemical reagent—General rules for the ion chromatography
GB 50073-2013 Code for design of clean room
SJ/T 11507-2015 Oxide Buffer Etchant Etrodeposition Solution for Integrated Circuits
SJ/T 11637-2016 Electronic chemicals and ICP-MS general rules
SJ/T 11638-2016 The testing methods for particles in electronic chemicals
GB/T 8979-2025 Pure nitrogen,high purity nitrogen and ultra pure nitrogen
GB/T 602-2026 Chemical reagent—Preparations of standard solutions for impurity
Related Standards
GB/T 2413-1981
Active
GB/T 3389.4-1982
Replaced
GB/T 3389.4-1982 Test methods for the properties of piezoelectric ceramics—Longitudinal length extension vibration mode for rod
GB/T 5594.1-1985
Active
GB/T 5594.1-1985 Test methods for properties of structure ceramic used in electronic components—Test method for gas-tightness
GB/T 5594.2-1985
Active
GB/T 5594.2-1985 Test methods for properties of structure ceramic used in electronic components—Test method for Youngs elastic modulus and Poisson ratio
GB/T 5594.3-1985
Replaced
GB/T 5594.3-1985 Test methods for properties of structure ceramic used in electronic components—Test method for mean coefficient of linear expansion
GB/T 5594.4-1985
Replaced