T/CEMIA 032-2022 Active Group standards

T/CEMIA 032-2022 Buffered oxide etchant for display panels

T/CEMIA 032-2022 Buffered oxide etchant for display panels

Publish Date: 2022-04-20 Implement Date: 2022-07-20 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/CEMIA 032-2022
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: Electronic devices and specialized materials, parts, and structural components
ICS Name: Special materials for electronic technology
Publish Date: 2022-04-20
Implement Date: 2022-07-20
Pages: 16 pages

Scope

This document specifies the abbreviations, classification, requirements, testing methods, inspection rules, and marking, packaging, transportation, storage, and safety of the oxide layer buffer etching solution for display panels.
This document is applicable to the oxide layer buffer etching solution for display panels, which is composed of aqueous hydrofluoric acid and aqueous ammonium fluoride, and is suitable for etching silicon oxide and silicon nitride layers in the manufacturing of display panels, as well as for the cleaning process of silicon oxide and silicon nitride layers.
The basic information of hydrofluoric acid and ammonium fluoride is provided in Appendix A, Section A.1.

Development Information

Word Count: 19 Thousand words Pages: 16 pages

Referenced Standards

GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 601-2002 Chemical reagent Preparations of standard volumetric solutions GB/T 601-2016 Chemical reagent—Preparations of reference titration solutions GB/T 602-2002 Chemical reagent—Preparations of standard solutions for impurity GB/T 603-2002 Chemical reagent—Preparations of reagent solutions for use in test methods GB/T 603-2023 Chemical reagent—Preparations of reagent solutions for use in test methods GB/T 6678-2003 General principles for sampling chemical products GB/T 6680-2003 General rules for sampling liquid chemical products GB/T 8170-1987 Rules for rounding off of numberical values GB/T 8170-2008 Rules of rounding off for numerical values & expression and judgement of limiting values GB/T 8979-1996 Pure nitrogen GB/T 8979-2008 Pure nitrogen and high purity nitrogen and ultra pure nitrogen GB/T 11446.1-1997 Electronic grade water GB/T 11446.1-2013 Electronic grade water GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals GB 15258-2009 General rules for preparation of precautionary label for chemicals GB 15603-1995 Rule for storage of chemical dangers GB 15603-2022 General rules for the hazardous chemicals warehouse storage GB/T 34672-2017 Chemical reagent—General rules for the ion chromatography GB 50073-2013 Code for design of clean room SJ/T 11507-2015 Oxide Buffer Etchant Etrodeposition Solution for Integrated Circuits SJ/T 11637-2016 Electronic chemicals and ICP-MS general rules SJ/T 11638-2016 The testing methods for particles in electronic chemicals GB/T 8979-2025 Pure nitrogen,high purity nitrogen and ultra pure nitrogen GB/T 602-2026 Chemical reagent—Preparations of standard solutions for impurity

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