GB/T 15678-1995
Replaced
YS/T 1068-2015
Active
Industry standards-Non-ferrous metals
YS/T 1068-2015 Ruthenium powder for ruthenium sputttering target
YS/T 1068-2015 Ruthenium powder for ruthenium sputttering target
Basic Information
Standard Code:
YS/T 1068-2015
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Precious metals and their alloys
ICS Name:
Other non-ferrous metal products
Publish Date:
2015-04-30
Implement Date:
2015-10-01
Pages:
6 pages
Scope
This standard specifies the requirements, test methods, inspection rules, and marking, packaging, transportation, storage, quality certificates, and contract (or order form) contents for ruthenium powder used in the preparation of ruthenium-based sputtering targets for the hard disk and integrated circuit industries.
This standard applies to ruthenium powder used in the preparation of ruthenium-based sputtering targets for the hard disk and integrated circuit industries (hereinafter referred to as ruthenium powder).
Development Information
Referenced Standards
GB/T 5162-1985 Metallic powders—Determination of tap density
GB/T 5162-2006 Metallic powders—Determination of tap density
GB/T 5162-2021 Metallic powders—Determination of tap density
GB/T 6524-2003 Metallic powders-Determination of particle size distribution by gravitational sedimentation in a liquid and attenuation measurement
GB/T 23275-2009 Methods for chemical analysis of ruthenium determination of lead,iron,nickel,aluminum,copper,silver,gold,platinum,palladium, rhodium,iridium and silicon in ruthenium powder by glow discharge mass spectrometry
HB 5220.3-1982 The determination of sulfur content in high-temperature alloys
HB 5220.3-2008 Methods for chemical analysis of superalloys-Part 3:Determination of carbon content by high frequency induction combustion-infrared absorption method
HB 5220.49-2008 Methods for chemical analysis of superalloys-Part 49:Determination of oxygen,nitrogen content by impulse heating-infrared,thermal conductivity method
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GB/T 4062-1998 Antimony trioxide
GB/T 13560-2000
Replaced
GB/T 13560-2000 Materials for sintered neodymium iron boron permanent magnets
GB/T 18113-2000
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GB/T 18113-2000 Heating element of lanthanum chromite in high temperature
GB/T 9967-2001
Replaced