GB 4962-1985
Replaced
T/ICMTIA ESG0014-2022
Active
T/ICMTIA ESG0014-2022 Mixed gas for integrated circuits, 30% oxygen/helium
T/ICMTIA ESG0014-2022 Mixed gas for integrated circuits, 30% oxygen/helium
Price:
$ 33.00
Basic Information
Standard Code:
T/ICMTIA ESG0014-2022
Standard Type:
Standard Status:
Active
is_force_gb:
no
CCS Name:
Industrial gases and chemical gases
ICS Name:
Industrial gases
Publish Date:
1970-01-01
Implement Date:
1970-01-01
Scope
Main technical content: This document specifies the technical requirements, test methods, sampling, judgment and re-inspection, marking, packaging, transportation, and storage of the 30% oxygen/helium mixed gas used in integrated circuits. This document is applicable to the 30% oxygen/helium mixed gas used in integrated circuits. For oxygen/helium mixtures with other component ratios, reference can be made to this document for implementation.
Development Information
Related Standards
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced