T/QGCML 744-2023 Active Group standards

T/QGCML 744-2023 Semiconductor equipment component chemical cleaning process specification

T/QGCML 744-2023 Semiconductor equipment component chemical cleaning process specification

Publish Date: 2023-04-17 Implement Date: 2023-04-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: T/QGCML 744-2023
Standard Type: Group standards
Standard Status: Active
is_force_gb: no
CCS Name: -
ICS Name: Integrated circuits, microelectronics
Publish Date: 2023-04-17
Implement Date: 2023-04-30

Scope

Main technical content: This standard specifies the terminology definitions, technical requirements, and chemical cleaning process methods for the chemical cleaning of semiconductor equipment components. This standard is applicable to the chemical cleaning process of semiconductor equipment components.

Development Information

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