DZ/T 0101.12-1994
Active
JJF 1351-2012
Active
National Metrology Technical Specifications JJF
JJF 1351-2012 Calibration Specification for Scanning Probe Microscopes
JJF 1351-2012 Calibration Specification for Scanning Probe Microscopes
Basic Information
Standard Code:
JJF 1351-2012
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
2012-06-18
Implement Date:
2012-09-18
Pages:
20 pages
Scope
This specification applies to the calibration of scanning probe microscopes that use the morphology of geometric surfaces as the measurement object.
Depending on the design principle of the scanning probe microscope, the relevant metrological characteristics need to be selected according to the actual situation during calibration. Measurement tasks with special requirements, such as measurements with high traceability requirements, are not within the scope of application of this calibration specification.
Development Information
Referenced Standards
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