GB/T 43661-2024 Active National standards

GB/T 43661-2024 Surface chemical analysis—Scanning probe microscopy—Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes(ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Publish Date: 2024-03-15 Implement Date: 2024-10-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 43661-2024

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2024-03-15

Implement Date: 2024-10-01

Pages: 16 pages

Scope

This document describes a method for measuring the spatial (lateral) resolution of a scanning capacitance microscope (SCM) or a scanning spreading resistance microscope (SSRM) using devices with sharp edges. These two types of microscopes are widely used in imaging the carrier distribution in semiconductor devices and measuring other electrical properties.