GB/T 28632-2012 Active National standards

GB/T 28632-2012 Surface chemical analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Determination of lateral resolution

Publish Date: 2012-07-31 Implement Date: 2013-02-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 28632-2012

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2012-07-31

Implement Date: 2013-02-01

Pages: 22 pages

Scope

This standard specifies methods for measuring the lateral resolution of Auger electron spectrometers and X-ray photoelectron spectrometers under three different conditions. The straight-edge method is suitable for instruments with an expected lateral resolution greater than 1 μm. The grid method is suitable for instruments with an expected lateral resolution greater than 20 nm and less than 1 μm. The Kimishima method is suitable for instruments with an expected lateral resolution less than 50 nm.
Appendices A, B, and C provide examples of graphs for measuring lateral resolution.