DB13/T 5865-2023 Active Hebei ProvinceLocal standards

DB13/T 5865-2023 The calibration method for surface particle inspection instrument on wafers

DB13/T 5865-2023 The calibration method for surface particle inspection instrument on wafers

Publish Date: 2023-10-25 Implement Date: 2023-11-25 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: DB13/T 5865-2023
Standard Type: Local standards
Standard Status: Active
is_force_gb: no
CCS Name: Measurement
ICS Name: \nSurface features
Publish Date: 2023-10-25
Implement Date: 2023-11-25

Development Information

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