GB/T 40344.4-2025 Vacuum technology—Standard methods for measuring vacuum-pump performance—Part 4:Turbomolecular vacuum pumps
GB/T 40344.4-2025 Vacuum technology—Standard methods for measuring vacuum-pump performance—Part 4:Turbomolecular vacuum pumps
Basic Information
Scope
This document and GB/T 40344.1 describe the performance measurement methods for turbomolecular pumps, which are applicable to all specifications and types of turbomolecular pumps. They include:
—— Those with mechanical bearings or magnetic bearings;
—— Those with/without additional traction stages or other rotor pumping stages;
—— Those with one or more inlet ports.
Due to the support of the preceding pump for turbomolecular pumps, the volume flow rate-inlet pressure curve cannot fully determine the performance of the turbomolecular pump. At the same time, the drive device and the preceding pump pressure of the turbomolecular pump also affect its performance parameters.
The following content is used to supplement the determination of its performance parameters:
—— The flow rate and preceding pump pressure of the turbomolecular pump;
—— The compression ratio curve (compression ratio of the turbomolecular pump-preceding pump pressure).