T/NMSP T/NMSP.MZB04.04-2024
Active
T/CHBAS 34-2023
Active
Group standards
T/CHBAS 34-2023 Mixed gas for integrated circuits, 10% ammonia/helium
T/CHBAS 34-2023 Mixed gas for integrated circuits, 10% ammonia/helium
Price:
$ 20.00
Basic Information
Standard Code:
T/CHBAS 34-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Other
Publish Date:
2023-07-27
Implement Date:
2023-07-27
Scope
Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, labeling, packaging, transportation, storage, and safety requirements for the mixed gas of 10% ammonia/helium used in integrated circuits. This document is applicable to the mixed gas of 10% ammonia/helium used in integrated circuits (hereinafter referred to as 10% ammonia/helium), and the mixed gas of ammonia and helium with other component ratios can be implemented in accordance with this document.
Development Information
Related Standards
T/DAJGSC 11-2019
Abolished
T/DAJGSC 11-2019 Fruit cultivation and management techniques for mulberry
T/QGCML 090-2021
Abolished
T/QGCML 090-2021 resin tungsten
T/FREA 1-2021
Active
T/FREA 1-2021 Real estate brokerage service standards
T/SRCA 002-2018
Abolished
T/SRCA 002-2018 Shanghai Municipal Group Standard Specification for Catering Management Services
T/QGCML 003-2019
Abolished