GB/T 16656.203-1997
Abolished
GB/T 37959-2019
Active
National standards
GB/T 37959-2019 Information model for containing process chamber IC equipment design
GB/T 37959-2019 Information model for containing process chamber IC equipment design
Basic Information
Standard Code:
GB/T 37959-2019
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic computer applications
ICS Name:
The application of information technology in industry
Publish Date:
2019-08-30
Implement Date:
2020-03-01
Pages:
18 pages
Scope
This standard specifies the information model of the modeling and simulation design software platform for integrated circuit equipment containing process chambers, and sets forth the general requirements for building a modeling and simulation design software platform for integrated circuit equipment containing process chambers.
This standard is applicable to the modeling and simulation design software for integrated circuit equipment containing process chambers.
Development Information
Related Standards
GB/T 16656.21-1997
Replaced
GB/T 16656.21-1997 Industrial automation systems and integration—Product data representation and exchange—Part 21:Implementation method:Clear text encoding of the exchange structure
GB/T 16656.31-1997
Active
GB/T 16656.31-1997 Industrial automation systems and integration—Product data representation and exchange—Part 31:Conformance testing methodology and framework:General concepts
GB/T 15049.10-1997
Abolished
GB/T 15049.10-1997 CAD standard parts file—Specification of geometry and parameters—Key
GB/T 15049.11-1997
Abolished
GB/T 15049.11-1997 CAD standard parts file—Specification of geometry and parameters—Rolling bearings
GB/T 17304-1998
Replaced