DB53/T 500-2013 Abolished Yunnan ProvinceLocal standards

DB53/T 500-2013 Determination of composition content of trichlorosilane for polycrystalline silicon by gas chromatography

Publish Date: 2013-08-01 Implement Date: 2013-10-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: DB53/T 500-2013

Standard Type: Local standards

Standard Status: Abolished

is_force_gb: no

CCS Name: Inorganic chemical raw materials

ICS Name: Chemical analysis

Publish Date: 2013-08-01

Implement Date: 2013-10-01

Scope

This standard specifies the method for determining the content of SiHCl3, SiH2Cl2, SiCl4, and HCl in trichlorosilane used in the production of polycrystalline silicon by gas chromatography. This standard is applicable to the determination of the content of SiHCl3, SiH2Cl2, SiCl4, and HCl in trichlorosilane used in the production of polycrystalline silicon by the modified Siemens process. The measurement range is: SiH2Cl2 > 0.01%, SiCl4 > 0.01%, and HCl > 0.01%.