GB/T 20175-2006 Active National standards

GB/T 20175-2006 Surface chemical analysis—Sputter depth profiling—Optimization using layered system as reference materials

Publish Date: 2006-03-27 Implement Date: 2006-11-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 20175-2006

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Electronic optics and other physical optical instruments

ICS Name: Chemical analysis

Publish Date: 2006-03-27

Implement Date: 2006-11-01

Pages: 18 pages

Scope

In order to set the instruments for Auger electron spectroscopy, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry to achieve the goal of depth resolution optimization, this standard uses appropriate single-layer and multi-layer film systems as reference materials to provide guidelines for optimizing the parameters of sputtering depth profiling. The use of special multi-layer film systems (such as various doped layer film systems) is not included in this standard.