GB/T 32293-2015 Vacuum technology—Selection of leak test methods for vacuum equipment
GB/T 32293-2015 Vacuum technology—Selection of leak test methods for vacuum equipment
Basic Information
Scope
This standard specifies the qualification requirements for personnel selecting leak detection methods for vacuum equipment, general requirements, safety requirements for leak detection implementation, selection procedures and selection principles, and the characteristic parameters of leak detection methods. This standard applies to the selection of leak detection methods for vacuum equipment, including vacuum containers, vacuum pipes, vacuum pumps, vacuum valves, vacuum coating equipment, vacuum drying equipment, vacuum freeze-drying equipment, surface analysis equipment, vacuum metallurgical equipment, space environment simulation equipment, semiconductor production equipment, and other vacuum equipment. The selection of leak detection methods for other equipment involving vacuum states during operation can also be carried out in accordance with this standard.